amateurguy
New Member
- Joined
- Mar 9, 2007
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Hello!
Can someone please help me integrate the following Gaussian function (the
function represents an impurity distribution profile in semiconductor
processing):
where Rs is the sheet resistance we're ultimately after, and its a function
of the impurity concentration N(x) from 0 to x
Rs = [ integral(q * u * N(x) dx) ]^-1
the integration limits are from 0 to x and everything in the square brackets
is raised to a power of -1.
q and u are constants (electron charge and electron mobility)
N(x) = No * exp ( -( x/(2*sqrt(Dt)) )^2 ) // the Gaussian function to be
integrated
No and Dt are constants and the exponential term is the negative square of
x/(2*sqrt(Dt))
Thank in advance for any and all help!
Mike
Can someone please help me integrate the following Gaussian function (the
function represents an impurity distribution profile in semiconductor
processing):
where Rs is the sheet resistance we're ultimately after, and its a function
of the impurity concentration N(x) from 0 to x
Rs = [ integral(q * u * N(x) dx) ]^-1
the integration limits are from 0 to x and everything in the square brackets
is raised to a power of -1.
q and u are constants (electron charge and electron mobility)
N(x) = No * exp ( -( x/(2*sqrt(Dt)) )^2 ) // the Gaussian function to be
integrated
No and Dt are constants and the exponential term is the negative square of
x/(2*sqrt(Dt))
Thank in advance for any and all help!
Mike